| name | dsa-process-controller |
| description | Directed Self-Assembly skill for block copolymer lithography and nanoparticle templating |
| allowed-tools | ["Read","Write","Glob","Grep","Bash"] |
| metadata | {"specialization":"nanotechnology","domain":"science","category":"fabrication","priority":"medium","phase":6,"tools-libraries":["BCP simulation tools","SCFT (Self-Consistent Field Theory)"]} |
| graph | {"domains":["domain:nanotechnology"],"skillAreas":["skill-area:mathematical-reasoning","skill-area:physics-simulation","skill-area:data-analysis"],"workflows":["workflow:experiment-design"],"roles":["role:research-engineer"]} |
DSA Process Controller
Purpose
The DSA Process Controller skill provides directed self-assembly process control for block copolymer lithography and nanoparticle templating, enabling sub-lithographic patterning through controlled polymer phase separation.
Capabilities
- Block copolymer selection and design
- Annealing protocol optimization
- Defect density analysis
- Pattern transfer protocols
- Graphoepitaxy and chemoepitaxy
- Long-range order characterization
Usage Guidelines
DSA Process Control
-
BCP Selection
- Match pitch to target
- Consider chi-N product
- Select morphology (lamellar, cylindrical)
-
Annealing Optimization
- Choose thermal vs solvent vapor
- Optimize temperature/time
- Achieve equilibrium morphology
-
Defect Analysis
- Classify defect types
- Quantify defect density
- Identify root causes
Process Integration
- Directed Self-Assembly Process Development
- Nanolithography Process Development
Input Schema
{
"bcp_system": "string (e.g., PS-b-PMMA)",
"target_pitch": "number (nm)",
"morphology": "lamellar|cylindrical|spherical",
"guiding_type": "graphoepitaxy|chemoepitaxy",
"substrate_pattern": "string"
}
Output Schema
{
"annealing_protocol": {
"method": "thermal|svA",
"temperature": "number (C)",
"time": "number (hours)",
"solvent": "string (optional)"
},
"achieved_pitch": "number (nm)",
"defect_density": "number (defects/um2)",
"correlation_length": "number (nm)",
"pattern_quality": "string"
}